SENTINEL Scrubbers
True Protection From Hazardous Gases
System Description
The Sentinel Series is a unique line of air pollution abatement devices specifically designed to treat semiconductor reactor effluent streams that contain highly corrosive, toxic or reactive gases. These point-of-use (POU) scrubbers are usually located as close to the process tool as possible, often in the sub-fab or cleanroom chase. These robust systems handle all water-soluble effluents from the process tool, including solids generating gases such as WF6, BCl3, and DCS.
Advantages
- Lowest cost of ownership
- SEMI S2 certified
- Reliable and easy to maintain
- Successfully treats F2
- N2 Shielded Inlet prevents water backstreaming to vacuum pump, keeps inlet clear
- Multiple chamber design hydrolyzes gases, removes both gases and particulates
- Extremely long gas residence time
- Removal efficiencies >99% on SiF4, DCS, WF6, HF, HCl, NH3 to name a few...
- Small footprint
- Integral 50 gallon sump
- Venturis induce gas flow and remove fine particles
- Zero pressure drop
- Liquids can be run in closed loop or continuous fashion
- Solid clear PVC construction
- Standalone and complete system integration capabilities
