INFINITY
Nonstop, Point-of-Use Abatement
System Description
The Infinity is a combination pyrophoric oxidation chamber and multistage wet scrubbing system. It is designed specifically for point-of-use (POU) applications where process gases are pyrophoric, water reactive, and corrosive, such as silicon nitride deposition and interlayer dielectric.
The Infinity safely combines low-cost compressed air or clean dry air (CDA) with tool exhaust gases from the vacuum pump. Pyrophoric gases are oxidized in the reaction housing (pyrophoric oxidation chamber). The gases remain dry until within a multi-chambered wet scrubber, thereby ensuring a clean open inlet port. The gases then enter an eductor venturi where particulate matter, such as SiO2, is removed. The next stage is a countercurrent packed section where water-soluble gases are absorbed. A high efficiency mist eliminator follows.
The Infinity utilizes state-of-the-art PLC for controls and monitoring of the system, plus a user-friendly operator interface terminal (OIT) for operator diagnostics.
Advantages
- Low cost of ownership
- UL, SEMI S2, and CE compliant
- Reduced water consumption
- Non-clogging gas-water phase inlet
- Ease of installation and facilitation
- Negative inlet pressure for improved suction from vacuum pump
- Redundant safety interlocks
- Maintenance friendly layout
- Zero pressure drop
- Multistage scrubbing
- Long path gas residence time
- Double contained enclosure
- Multi-inlets available for multi-chamber tools
